Shingubara, S. ; Murakami, Y. ; Morimoto, K. ; Sakaue, H. ; Takahagi, T.
Pub. info.:
Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.. pp.133-138, 2002. Warrendale, Pa.. Materials Research Society
Sano, H. ; Morimoto, K. ; Aritsuka, Y. ; Fujita, H.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology IX. pp.799-804, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering