1.

Conference Proceedings
Conference Proceedings
1. Performance of cell-shift defect inspection technique
Morikawa,Y. ; Ogawa,T. ; Tsuchiya,K. ; Noguchi,S. ; Nakashima,K.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.404-414,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
2.

Conference Proceedings
Conference Proceedings
2. Realization of practical attenuated phase-shift mask with high-transmission KrF excimer laser exposure
Toyama,N. ; Miyashita,H. ; Morikawa,Y. ; Fujita,H. ; Iwase,K. ; Mohri,H. ; Hayashi,N. ; Sano,H.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.350-358,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873