1.

Conference Proceedings
Conference Proceedings
1. Progress of the MMT adaptive optics program
Wildi,F.P. ; Brusa,G. ; Riccardi,A. ; Allen,R.G. ; Lloyd-Hart,M. ; Miller,D. ; Martin,B. ; Biasi,R. ; Gallieni,D.
Pub. info.: Adaptive optics systems and technology II : 30 July-1 August 2001, San Diego, USA.  pp.11-18,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4494
2.

Conference Proceedings
Conference Proceedings
2. Electrical critical dimension metrology for 100-nm Iinewidths and below
Grenville,A. ; Coombs,B. ; Hutchinson,J.M. ; Kuhn,K.J. ; Miller,D. ; Troccolo,P.M.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.452-459,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000