1.

Conference Proceedings
Conference Proceedings
1. INVITED: SILICON ON INSULATOR WAFERS USING THE SMART CUT TECHNOLOGY
Auberton-Herve, A.J. ; Barge, T. ; Metral, F. ; Bruel, M. ; Aspar, B. ; Moriceau, H.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1341-1360,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
2.

Conference Proceedings
Conference Proceedings
2. Smart-Cut(R): The Basic Fabrication Process for Unibond(R) SOI Wafers
Auberton-Herve, A. J. ; Barge, T. ; Metral, F. ; Bruel, M. ; Aspar, B. ; Meleville, C. ; Moriceau, H. ; Poumeyrol, T.
Pub. info.: Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A..  pp.177-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 446