Jeong, Y. ; Sakuraba, M. ; Matsuura, T. ; Murota, J.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.287-296, 2002. Pennington, NJ. Electrochemical Society
Jeong, Y. ; Sakuraba, M. ; Matsuura, T. ; Murota, J.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.287-296, 2002. Pennington, NJ. Electrochemical Society
Tsuji, N. ; Okuno, S. ; Matsuura, T. ; Koizumi, Y. ; Minamino, Y.
Pub. info.:
THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain. pp.2667-2672, 2003. Zuerich-Uetikon, Switzerland. Trans Tech Publications