1.

Conference Proceedings
Conference Proceedings
1. PERFECT SILICON SURFACE BY HYDROGEN-ANNEALING
Kubota, H. ; Numano, M. ; Amai, T. ; Miyashita, M. ; Samata, S. ; Matsushita, Y.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.225-236,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings
Conference Proceedings
2. INVITED: HYDROGEN ANNEAL OF SILICON WAFER FORMATION OF HIGH QUALITY DEVICE ACTIVE LAYER
Matsushita, Y. ; Sanada, M. ; Tanabe, A. ; Takeda, R. ; Shimaoi, N. ; Kobayashi, K.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.683-697,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
3.

Conference Proceedings
Conference Proceedings
3. INTRODUCTORY REMARKS: 'GEAR OF CHALLENGE': SMART AND AFFORDABLE DIAGNOSTICS
Fabry, L. ; Matsushita, Y.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1459-1465,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
4.

Conference Proceedings
Conference Proceedings
4. LIQUID PHASE HOMOEPITAXIAL GROWTH OF 4H-SiC CRYSTALS AND FABRICATION TECHNIQUES OF BLUISH-PURPLE LIGHT-EMITTING DIODES
Ueda, Y. ; Nakata, T. ; Koga, K. ; Matsushita, Y. ; Fujikawa, Y. ; Uetani, T. ; Yamaguchi, T. ; Niina, T.
Pub. info.: Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.427-432,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 162
5.

Conference Proceedings
Conference Proceedings
5. THE INTERRELATION BETWEEN THE MORPHOLOGY OF THE OXYGEN PRECIPITATES AND THE JUNCTION LEAKAGE CURRENT IN CZOCHRALSKI SILICON CRYSTALS
Fujimori, H. ; Ushiku, Y. ; Ihnuma, T. ; Kirino, Y. ; Matsushita, Y.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1033-1044,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
6.

Conference Proceedings
Conference Proceedings
6. Mixed Contamination Effect of Trace Elements on the OSF/BMD Generation
Kageyama, M. ; Tsuchiya, N. ; Matsushita, Y.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II.  pp.202-210,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-3
7.

Conference Proceedings
Conference Proceedings
7. Hydrogen Annealing of Silicon Wafer
Samata, S. ; Numano, M. ; Amai, T. ; Matsushita, Y. ; Kobayashi, K. ; Yamamoto, A. ; Kawaguchi, T. ; Nadahara, S. ; Yamabe, K.
Pub. info.: Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects.  pp.101-110,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-1
8.

Conference Proceedings
Conference Proceedings
8. High Quality Hydrogen-Annealed Wafers
Yoshikawa, J. ; Takeda, R. ; Hayashi, K. ; Shirai, H. ; Matsushita, Y.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.250-261,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13