Takahashi, R. ; Tanigawa, T. ; Yamamoto, Y. ; Yonezawa, Y. ; Matsumoto, Y. ; Koinuma, H.
Pub. info.:
Combinatorial and artificial intelligence methods in materials science II : symposium held December 1-4, Boston, Massachusetts, U.S.A. pp.69-74, 2004. Warrendale, Pa.. Materials Research Society
Micromachining and Microfabrication Process Technology IX. pp.221-228, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering