Kadono, K. ; Akai, T. ; Yamashita, M. ; Sheng, J. ; Chen, S. ; Yao, Z. ; Itakura, N. ; Yamate, T. ; Utagawa, Y. ; Matsumoto, Y. ; Yazawa, T.
Pub. info.:
International symposium on photonic glass (ISPG 2002) : 14-17 October 2002, Shanghai, China. pp.156-163, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Owa, S. ; Matsumoto, Y. ; Ohmura, Y. ; Sakuma, S. ; Aoki, T. ; Nishikawa, J. ; Nagasaka, H. ; Mizutani, T. ; Shiraishi, N. ; Kido, K. ; Tanaka, I. ; Nagatsuka, J.
Pub. info.:
Optical Microlithography XVI. Part Two pp.772-780, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering