1.
Conference Proceedings |
Puff,W. ; Mascher,P. ; Hahn,S. ; Cho,K.H. ; Lee,B.Y.
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2.
Conference Proceedings |
2. Defect distribution in large CZ-silicon wafers investigated by positron annihilation spectroscopy
Mascher,P. ; Puff,W. ; Hahn,S. ; Cho,K.H. ; Lee,B.Y.
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