Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.50-57, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Taylor, C. ; Prince, R. ; Malshe, A.P. ; Riester, L. ; Salamo, G.J. ; Cho, S.O.
Pub. info.:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.424-434, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Komanduri, R. ; Chen, J. ; Malshe, A.P. ; Doumanidis, H. ; Rajurkar, K.P.
Pub. info.:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.446-454, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering