1.

Conference Proceedings

Conference Proceedings
Yakovlev, E. V. ; Talalaev, R. A. ; Karpov, S. Yu. ; Shpolyanskiy, Yu. A. ; Makarov, Yu. N. ; Lowry, S. A.
Pub. info.: New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A..  pp.153-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 616
2.

Conference Proceedings

Conference Proceedings
Segal, A. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu. N.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.567-577,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2