Yakovlev, E. V. ; Talalaev, R. A. ; Karpov, S. Yu. ; Shpolyanskiy, Yu. A. ; Makarov, Yu. N. ; Lowry, S. A.
Pub. info.:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.153-, 2000. Warrendale, PA. MRS-Materials Research Society
Segal, A. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu. N.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.567-577, 2002. Pennington, NJ. Electrochemical Society