1.

Conference Proceedings
Conference Proceedings
1. Microfabrication technique for thick structure of metals and PZT
Shimizu,T. ; Murakoshi,Y. ; Wang,Z. ; Maeda,R. ; Sano,T.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.472-477,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings
Conference Proceedings
2. Preparation and characterization of sol-gel-derived PZT thin films for microactuators
Wang,Z. ; Maeda,R. ; Kikuchi,K.M.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.948-955,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680