1.

Conference Proceedings
Conference Proceedings
1. Optical switch array based on microforming process
Hashiura, Y. ; Ikehara, T. ; Kitajima, A. ; Goto, H. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.414-421,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
2.

Conference Proceedings
Conference Proceedings
2. Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and vacuum metal casting
Murakoshi, Y. ; Hanada, K. ; Li, Y. ; Uchino, K. ; Suzuki, T. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.473-480,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
3.

Conference Proceedings
Conference Proceedings
3. Microneedle array and insertion guide array for safe use of biomedical applications
Khumpuang, S. ; Maeda, R. ; Sugiyama, S.
Pub. info.: BioMEMS and nanotechnology : 10-12 December 2003, Perth, Australia.  pp.231-238,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5275
4.

Conference Proceedings
Conference Proceedings
4. High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine
Shan, X.C. ; Murakoshi, Y. ; Wang, Z. ; Lu, H.J. ; Jin, Y. ; Ikehara, T. ; Maeda, R. ; Wong, C.K.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.428-433,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
5.

Conference Proceedings
Conference Proceedings
5. Formation and its characteristics of PLZT layered film structure for transducers
Ichiki, M. ; Kobayashi, T. ; Morikawa, Y. ; Mabune, Y. ; Nakada, T. ; Nonaka, K. ; Endo, C. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.400-407,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
6.

Conference Proceedings
Conference Proceedings
6. Preparation of PZT films derived by hybrid processing for MEMS application
Yan, L. ; Wang, Z.J.M. ; Kokawa, H. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.414-421,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
7.

Conference Proceedings
Conference Proceedings
7. An Easy Fabrication Technique for Micro Paraffin Actuator and Application to Microvalve
Kobayashi, T. ; Matsuoka, S. ; Ueno, A. ; Maeda, R.
Pub. info.: Microfabricated systems and MEMS VII : proceedings of the international symposium.  pp.330-335,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-09
8.

Conference Proceedings
Conference Proceedings
8. Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation
Zhang, L. ; Ichiki, M. ; Wang, Z.-J. ; Maeda, R.
Pub. info.: Smart materials II : 16-18 December 2002, Melbourne, Australia.  pp.30-37,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4934
9.

Conference Proceedings
Conference Proceedings
9. In situ deposition of epitaxial PZT films by pulsed laser deposition
Wang, Z. J. ; Yan, L. J. ; Kokawa, H. ; Maeda, R.
Pub. info.: Smart materials III : 13-15 December 2004, Sydney, Australia.  pp.89-96,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5648
10.

Conference Proceedings
Conference Proceedings
10. Deposition of Pb(Zr XTi1-X )03 thin films by pulsed laser ablation for MEMS application
Wang, Z.-J. ; Maeda, R. ; Kokawa, H.
Pub. info.: Smart materials II : 16-18 December 2002, Melbourne, Australia.  pp.356-363,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4934