1.

Conference Proceedings
Conference Proceedings
1. 0.25-ｦﾌm logic manufacturability using practical 2D optical proximity correction
Kling,M.E. ; Lucas,K.D. ; Reich,A. ; Roman,B.J. ; Chuang,H. ; Gilbert,P.V. ; Grobman,W.D. ; Travis,E.O. ; Tsui,P. ; Vuong,T. ; West,J.P.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.204-214,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. Extension of the traditional optical model for investigation into EUV projection lithography capabilities
Ivin,V.V. ; Lucas,K.D. ; Makhviladze,T.M. ; Manuilov,V.V. ; Medvedeva,M.G
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.646-654,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
3.

Conference Proceedings
Conference Proceedings
3. Metropole-3D: a rigorous 3D topography simulator
Li,X. ; Lucas,K.D. ; Swecker,A.L. ; Strojwas,A.J.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.717-728,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334