1.

Conference Proceedings
Conference Proceedings
1. A New Method of Mapping and Counting Micropipes In SiC Wafers
Wan, J.W. ; Park, S.H. ; Chung, G. ; Carlson, E. ; Loboda, M.J.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.447-450,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
2.

Conference Proceedings
Conference Proceedings
2. Simple, Calibrated Analysis and Mapping of SiC Wafer Defects by Birefringence Imaging
Park, S.H. ; Loboda, M.J. ; Spaulding, M.J.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.721-724,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
3.

Conference Proceedings
Conference Proceedings
3. Non-Equilibrium Carrier Diffusion and Recombination in Semi-Insulating PVT Grown Bulk 6H-SiC Crystals
Neimontas, K. ; Kadys, A. ; Aleksiejunas, R. ; Jarasiunas, K. ; Chung, G. ; Sanchez, E.K. ; Loboda, M.J.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.469-472,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
4.

Conference Proceedings
Conference Proceedings
4. Resistivity Distribution in Undoped 6H-SiC Boules and Wafers
Li, Q. ; Polyakov, A.Y. ; Skowronski, M. ; Sanchez, E.K. ; Loboda, M.J. ; Fanton, M.A. ; Bogart, T. ; Gamble, D. ; Smirnov, N.B. ; Makarov, Yu.N.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.51-54,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
5.

Conference Proceedings
Conference Proceedings
5. A Study of Nitrogen Incorporation in PVT Growth of n+ 4H SiC
Hansen, D.M. ; Chung, G. ; Loboda, M.J.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.59-62,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
6.

Conference Proceedings
Conference Proceedings
6. Homoepitaxial Growth of 4H-SiC Using a Chlorosilane Silicon Precursor
MacMillan, M.F. ; Loboda, M.J. ; Chung, G. ; Carlson, E. ; Wan, J.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.175-178,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
7.

Conference Proceedings
Conference Proceedings
7. Characterization of Ashing Effects on Low-k Dielectric Films
Shepherd, R.A. ; Nguyen, D. ; Cerny, G. ; Loboda, M.J.
Pub. info.: Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium.  pp.159-167,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-5
8.

Conference Proceedings
Conference Proceedings
8. The Influence of Temperature on the Deposition of Low-k Films by PECVD of Trimethylsilane
Hwang, B.K. ; Loboda, M.J. ; Cerny, G. ; Schneider, R. ; Seifferly, J.
Pub. info.: Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium.  pp.63-71,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-5