1.

Conference Proceedings
Conference Proceedings
1. The Measurement of Submicron Epitaxial Layer Thickness and Free Carrier Concentration by Infrared Reflectance Spectroscopy
Fowler, B.W. ; Simmons, D.G. ; Carpio, R.A. ; Liu, S. ; Solomon, P.R. ; Nishikida, K.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.254-265,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33
2.

Conference Proceedings
Conference Proceedings
2. A Comparison of Infrared Reflectance Spectroscopy and Spectroscopic Ellipsometry for Polysilicon Film Process Control
Carpio, R. ; Fowler, B. ; Simmons, D.G. ; Liu, S. ; Solomon, P.R.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.243-253,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33