Terry, Jeff ; Liu, H. ; Cao, R. ; Woicik, J.C. ; Pianetta, P. ; Yang, X. ; Wu, J. ; Richter, M. ; Maluf, N. ; Pease, F. ; Dillon, A. ; Robinson, M. ; George, S.
Pub. info.:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.421-426, 1992. Pittsburgh, Pa.. Materials Research Society