Gaughan, K. ; Lin, Z. ; Viner, J.M. ; Taylor, P.C. ; Mathur, P.C.
Pub. info.:
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.. pp.503-508, 1993. Pittsburgh, Pa.. Materials Research Society
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1402-1408, 1997. Pennington, NJ. Electrochemical Society