1.

Conference Proceedings
Conference Proceedings
1. Poly Gate Depletion Effect on Deep Submicrometer CMOS
Ye, Q. ; Limb, Y. ; Berry, W. ; Li, Y. ; Do Thanh, L. ; Rengarajan, R. ; Tonti, W.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.301-310,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
2.

Conference Proceedings
Conference Proceedings
2. REMOVAL OF Fe AND Al BY PYROCHEMICAL CLEANING
Limb, Y. ; Nguyen, B.Y. ; Tobin, P.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.409-415,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7