Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan. pp.294-297, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart materials, structures, and integrated systems : 11-13 December 1997, Adelaide, Australia. pp.75-83, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.607-613, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Quantum well and superlattice physics VI : 29-30 January 1996, San Jose, California. pp.59-75, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering