1.

Conference Proceedings

Conference Proceedings
Leskela, M. ; Niinisto, L. ; Nykanen, E. ; Soininen, P. ; Tiitta, M.
Pub. info.: Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A..  pp.315-320,  1991.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 222
2.

Conference Proceedings

Conference Proceedings
Kukli, K. ; Ritala, M. ; Leskela, M.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1137-1144,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25