1.

Conference Proceedings
Conference Proceedings
1. Thapping Centers in Borophosphosilicate and Phosphosilicate Thin Films on Silicon
Lenahan, P.M. ; Billman, C.A. ; Fuller, R. ; Lowry, R.K. ; Evans, H.
Pub. info.: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.46-54,  1997.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-10
2.

Conference Proceedings
Conference Proceedings
2. Point Defect Structure And Behavior As A Function Of Processing Parameters And P.M. Lenahan Composition In Silicon Oxynitride Films
Yount, J.T. ; Lenahan, P.M.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.73-82,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
3.

Conference Proceedings
Conference Proceedings
3. A Physically Based Predictive Model of Charge Trapping in Gate Oxides
Lenahan, P.M. ; Conley, J.F. ; Wallace, B.D.
Pub. info.: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.275-284,  1997.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-10
4.

Conference Proceedings
Conference Proceedings
4. Identification of the Microscopic Structure of New Hot Carrier Damage Centers in Short Chan-nel MOSFETs
Billman, C.A. ; Lenahan, P.M. ; Weber, W.
Pub. info.: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.134-142,  1997.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-10
5.

Conference Proceedings
Conference Proceedings
5. ELECTRON SPIN RESONANCE STUDIES OF SILICON DIOXIDE FILMS ON SILICON IN INTEGRATED CIRCUITS USING SPIN DEPENDENT RECOMBINATION
Jupina, M.A. ; Lenahan, P.M.
Pub. info.: Atomic scale structure of interfaces : symposium held November 27-29, 1989, Boston Massachusetts, U.S.A..  pp.191-196,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 159
6.

Conference Proceedings
Conference Proceedings
6. Oxide Leakage Currents and Oxygen Deficient Silicon
Lenahan, P.M. ; Mele, J. ; Fattu, M. ; Lowry, R.K. ; Woodbury, D.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium.  pp.50-56,  1999.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-6