1.

Conference Proceedings
Conference Proceedings
1. Accuracy of transmittance measurement of inspection machine for semitransparent defect and its detectability
Kim,J.B. ; Hur,I.B. ; Jeong,S.H. ; Son,Y.S. ; Lee,K.Y. ; Lee,S.W. ; Shin,C. ; Kim,H.S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.507-511,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of reticle cleaning performance with different drying methods for high-grade photomasks
Jeong,W.G. ; Lee,S.W. ; Kim,D.H. ; Yoon,Y.J. ; Lee,D.H. ; Choi,B.Y. ; Choi,S.-S. ; Jung,S.M. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.99-110,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562