1.

Conference Proceedings
Conference Proceedings
1. SILICON ETCHING MECHANISMS--DOPING EFFECT
Lee, Y. H. ; Chen, M. M. ; Bright, A. A.
Pub. info.: Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A..  pp.163-170,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 38
2.

Conference Proceedings
Conference Proceedings
2. FURNACE AND RAPID THERMAL ANNEALING OF P IMPLANTED SILICON FOR SOLAR CELL FABRICATION
Harrison, H B. ; Lee, Y. H. ; Poganym A. ; Kenny, M. J.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.343-348,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45
3.

Conference Proceedings
Conference Proceedings
3. PROPERTIES OF HIGH DOSE LOW TEMPERATURE RAPID THERMALLY ANNEALED GALLIUM IMPLANTED SILICON
Lee, Y. H. ; Harrison, H. B. ; Pogany, A. P. ; Olson, G. L
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.21-26,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92