Lee, J.C. ; Rhee, S. ; Kang, C. ; Choi, C. ; Krishnan, S. ; Ok, I. ; Akbar, M. ; Kim, H. ; Zhu, F. ; Zhang, M. ; Lee, T.
Pub. info.:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium. pp.389-402, 2005. Pennington, N.J.. Electrochemical Society