1.

Conference Proceedings
Conference Proceedings
1. CHARACTERISTICS AND RECOVERY OF Si SURFACES PLASMA ETCHING IN CHF3/C2F6
Park, H.-H. ; Kwon, K.H. ; Koak, B.-H. ; Lee, S.-M. ; Kwon, O-J. ; Kim, B.-W. ; Lee, J.-W. ; Yoo, J.-B. ; Sung, Y.-K.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.219-224,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. Synthesis and Characterization of New C603 Salts by Ion Exchange
Ziebarth, R. ; Lee, S.-M. ; Stenger, V. ; Pennington, C.
Pub. info.: Proceedings of the symposium on recent advances in the chemistry and physics of fullerenes and related materials.  pp.316-329,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-10