1.

Conference Proceedings
Conference Proceedings
1. The Kinetics of Shear-Induced Crystallization in Poly(ethylene terephthalate)
Ahn, S. H. ; Cho, C. B. ; Lee, K. Y.
Pub. info.: ANTEC '99 Conference proceedings, New York City, May 2-6, 1999 : plastics bridging the millennia.  2  pp.2392-2396,  1999.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 45(2)
2.

Conference Proceedings
Conference Proceedings
2. Electromigration Drift Velocity in Al and Cu Interconnection
Hu, C.-K. ; Lee, K. Y. ; Lee, K. L. ; Cabral, C., Jr. ; Colgari, E. C.
Pub. info.: Proceedings of the Symposium on Reliability of Metals in Electronics.  pp.203-214,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-3
3.

Conference Proceedings
Conference Proceedings
3. Thermal and Electromigration Strain Distributions in 10-ｦﾌm-Wide Aluminum Conductor Lines Measured by X-ray Microdiffraction
Wang, P-C. ; Cargill, G. S., III. ; Noyan, I. C. ; Liniger, E. G. ; Hu, C-K. ; Lee, K. Y.
Pub. info.: Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A..  pp.273-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 473
4.

Conference Proceedings
Conference Proceedings
4. Extendibility of Cu Damascene to 0.1 ｦﾌm Wide Interconnections
Hu, C-K. ; Lee, K. Y. ; Gignac, L. ; Rossnagel, S. M. ; Uzoh, C. ; Chan, K. ; Roper, P. ; Harper, J. M. E.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.287-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
5.

Conference Proceedings
Conference Proceedings
5. Copper Migration and Precipitate Dissolution in Aluminum/Copper Lines During Electromigration Testing
Shaw, T. M. ; Hu, C-K. ; Lee, K. Y. ; Rosenberg, R.
Pub. info.: Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.187-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 428
6.

Conference Proceedings
Conference Proceedings
6. Benzyloxypropene-protected PHS resist system for e-beam applications
Huang, W. -S. ; Kwong, R. W. ; Moreau, W. M. ; Chace, M. ; Lee, K. Y. ; Hu, C. K. ; Angelopoulos, M.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.1052-1061,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
7.

Conference Proceedings
Conference Proceedings
7. A MULTILAYER INTERCONNECT PROCESS FOR 0.5ｦﾌm LOGIC TECHNOLOGY
Kim, Donghyun ; Oh, H. S. ; Lee, K. Y. ; Kim, Y. S. ; Kim, B. S. ; Kim, B. G.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.81-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337
8.

Conference Proceedings
Conference Proceedings
8. X-ray Microdiffraction for VLSI
Wang, P.-C. ; Cargill, G. S., III ; Noyan, I. C. ; Liniger, E. G. ; Hu, C.-K. ; Lee, K. Y.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.35-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
9.

Conference Proceedings
Conference Proceedings
9. ICP (inductively coupled plasma) dry etch of DUV MoSi HTPSM
Lee, K. Y. ; Kim, L. J. ; Nam, K. -H. ; Park, K. T. ; Ku, Y. M. ; Ku, S. S. ; Hur, I. B.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.158-165,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748