Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.684-688, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Materials reliability in microelectronics IX : symposium held April 6-8, 1999, San Francisco, California, U.S.A.. pp.225-, 1999. Pittsburgh, Pa.. MRS - Materials Research Society
Curtis, M. D. ; Blanda, W. ; Politis, J. K. ; Francis, A. H. ; Lee, J. ; Kampf, J. W. ; Gonzalez-Ronda, L. ; Martin, D. C.
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Solid state ionics V : symposium held November 28-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.285-294, 1999. Pittsburgh, Pa.. Materials Research Society