1.

Conference Proceedings
Conference Proceedings
1. EFFECTS OF PRE-GATE OXIDATION INTRINSIC GETTERING UPON THIN GATE OXIDE INTEGRITY IN HIGH CARBON CONTENT Cz Si
Hahn, S. ; Tung, C. Y. ; Lee, J. ; Tuomi, T. ; Partanen, J.
Pub. info.: Multilayers : synthesis, properties, and non-electronic applications : symposium held December 2-4, 1987, Boston, Massachusetts, U.S.A..  pp.103-108,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 103
2.

Conference Proceedings
Conference Proceedings
2. EFFECTS OF PRE-GATE OXIDATION INTRINSIC GETTERING UPON THIN GATE OXIDE INTEGRITY IN HIGH CARBON CONTENT Cz Si
Hahn, S. ; Tung, C. Y. ; Lee, J. ; Tuomi, T. ; Partnanen, J.
Pub. info.: SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A..  pp.103-108,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 105