Oh, S. K. ; Kim, J. Y. ; Jung, Y. H. ; Lee, J. W. ; Kim, D. B. ; Kim, J. ; Lee, G. S. ; Lee, S. K. ; Ban, K. D. ; Jung, J. C. ; Bok, C. K. ; Moon, S. C.
Pub. info.:
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.181-186, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Lee, -H. E. ; Lee, G. S. ; O, H. B. ; Park, G. S. ; Kim, H. K. ; Song, H. S. ; Noh, S. H.
Pub. info.:
Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits. pp.618301-618301, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering