1.

Conference Proceedings
Conference Proceedings
1. *CHEMICAL MECHANICAL POLISHING OF INTERLEVEL DIELECTRICS: MODELS FOR REMOVAL RATE AND PLANARITY
Sivaram,. S. ; Tolles, R. ; Bath, H. ; Lee, E. ; Leggett
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.53-66,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
2.

Conference Proceedings
Conference Proceedings
2. Particle and Process Improvements in an MERIE Dielectric Etcher
Olsen, D. A. ; DeLaurentis, E. ; Lee, E. ; Chillal, M. ; Wu, R.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.348-356,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
3.

Technical Paper
Technical Paper
3. Robotic palletization of different box sizes using a vision system
Abdou, G. ; Lee, E.
Pub. info.: SME technical paper series.  pp.1P-,  1990.  Society of Manufacturing Engineers