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Conference Proceedings

1. PROPERTIES OF ULTRATHIN AMORPHOUS SILICON NITRIDE FILMS ON III-V SEMICONDUCTORS

Huang, L.J. ; Kwok, R.W.M. ; Lau, W.M. ; Tang, H.T. ; Lennard, W.N. ; Mitchell, I.V. ; Schultz, Peter J. ; Landheer, D.

Pub. info.:	Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.595-600, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	284

Conference Proceedings

2. Physical And Electrical Characteristics Of Thin Anodic Oxides On Si(100)

Bardwell, J.A. ; Landheer, D. ; Schmuki, P.

Pub. info.:	Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.414-424, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-16

Conference Proceedings

3. Properties of Gate-Quality Silicon Nitride and Oxynitride Dielectrics Deposited Using an Electron Cyclotron-Resonance Plasma Source

Landheer, D. ; Hulse, J.E. ; Quance, T. ; Aers, G.C. ; Sproule, G.I. ; Lennard, W.N. ; Simpson, P.J. ; Nlassoumi, G.R.

Pub. info.:	Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium. pp.75-89, 1999. Pennington, New Jersey. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-6

Conference Proceedings

4. Interface state densities for SiNx:H on cleaved GaAs and InP(110)

Landheer, D. ; Hulse, J.E. ; Rajesh, K.

Pub. info.:	Compound semiconductor surface passivation and novel device processing : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.253-258, 1999. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	573

Conference Proceedings

5. X-RAY STUDIES OF LOW-TEMPERATURE GROWN SiO2 ON Si

Baribeau, J.-M. ; Landheer, D. ; Bardwell, J. A. ; Clark, K. B. ; Headrick, R. L.

Pub. info.:	Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.75-, 1994. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	318

Conference Proceedings

6. Properties of Gate-Quality SiO2 Films Prepared by Electron Cyclotron Resonance Chemical Vapour Deposition in an Ultra-High Vacuum Processing System

Tao, Y. ; Landheer, D. ; Hulse, J. E. ; Xu, D. -X. ; Quance, T.

Pub. info.:	Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.255-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	386

Conference Proceedings

7. Low-Temperature Low-Stress Silicon Nitride for Optoelectronic Applications Prepared by Electron-Cyclotron Resonance Plasma Chemical Vapor Deposition

Belkouch, S. ; Landheer, D. ; Taylor, R. ; Rajesh, K. ; Sproule, G. I.

Pub. info.:	Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.151-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	446

Conference Proceedings

8. Postmetallization Annealing of Ultrathin Remote Plasma-Enhanced CVD Oxides

Ragnarsson, L-A. ; Lundgren, P. ; Landheer, D.

Pub. info.:	Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.35-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	446

Conference Proceedings

9. Mechanisms of Film Growth Rate Enhancement in Anodic and Cathodic Corona-Discharge Pro-cesses

Sayedi, S.M. ; Landheer, D. ; Landsberger, L.M. ; Kahrizi, M.

Pub. info.:	Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.481-492, 1997. Pennington, New Jersey. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-10

10.

Conference Proceedings

10. Electrical Characterization of Thin Anodic Corona-Discharge-Processed SiO2 Films on Sili-con

Sayedi, S.M. ; Landsberger, L.M. ; Kahrizi, M. ; Belkouch, S. ; Landheer, D.

Pub. info.:	Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.469-480, 1997. Pennington, New Jersey. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-10

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