Botton, G.A. ; Romain, E. ; Landheer, D. ; Wu, X. ; Wu, M.-Y. ; Lee, M. ; Lu, Z.-H.
Pub. info.:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.251-261, 2003. Pennington, N.J.. Electrochemical Society
Landheer, D. ; Gupta, J. ; Hulse, J. ; Sproule, I. ; McCaffrey, J. ; Graham, M. ; Yang, K.-C. ; Lu, Z. ; Lennard, W.N.
Pub. info.:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.193-204, 2000. Pennington, N.J.. Electrochemical Society