Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.414-424, 1994. Pennington, NJ. Electrochemical Society
Baribeau, J.-M. ; Landheer, D. ; Bardwell, J. A. ; Clark, K. B. ; Headrick, R. L.
Pub. info.:
Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.75-, 1994. Pittsburgh. MRS - Materials Research Society