Sayedi, S.M. ; Landheer, D. ; Landsberger, L.M. ; Kahrizi, M.
Pub. info.:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.481-492, 1997. Pennington, New Jersey. Electrochemical Society
Sayedi, S.M. ; Landsberger, L.M. ; Kahrizi, M. ; Belkouch, S. ; Landheer, D.
Pub. info.:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.469-480, 1997. Pennington, New Jersey. Electrochemical Society