1.

Conference Proceedings
Conference Proceedings
1. Investigation of stress/strain of silicon on insulator using optical second harmonic generation method
Y. Gu ; C. Hu ; L. Cheng ; D.Y. Zang ; G.-P. Li
Pub. info.: Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas.  pp.93-103,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2337
2.

Conference Proceedings
Conference Proceedings
2. Rotational Compliance Measurement of a Flexible Plane Structure
Y.C. Qu ; L. Cheng
Pub. info.: Proceedings of the 13th International Modal Analysis Conference : February 13-16, 1995, Sheraton Misic City Hotel, Nashville, Tennessee.  pp.948-954,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2460