Walecki, W. J. ; Azfor, T. ; Pravdivstev, A. ; Santos II M ; Koo, A.
Pub. info.:
Micromachining and Microfabrication Process Technology XI. pp.61090J-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Walecki, W. J. ; Azfar, T. ; Pravdivstev, A. ; SantosII, M. ; Wong, T. ; Feng, A. ; Koo, A.
Pub. info.:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V. pp.61110M-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering