1.

Conference Proceedings
Conference Proceedings
1. Synchronized low coherence interferometry for in situ and ex situ metrology for semiconductor manufacturing [5880-18]
Walecki, W. J. ; Pravdivtsev, A. ; Lai, K. ; Santos II, M. ; Koo, A.
Pub. info.: Optical Diagnostics.  pp.58800H-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5880
2.

Conference Proceedings
Conference Proceedings
2. Combined low-coherence interferometry and spectrally resolved reflectometry for nondestructive characterization of small-diameter high-aspect ratio micro-fabricated and micro-machined structures and multilayer membranes [6109-21]
Walecki, W. J. ; Azfor, T. ; Pravdivstev, A. ; Santos II M ; Koo, A.
Pub. info.: Micromachining and Microfabrication Process Technology XI.  pp.61090J-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6109
3.

Conference Proceedings
Conference Proceedings
3. Fast and accurate non-contact in situ optical metrology for end-point detection [6292-39]
Walecki, W. J. ; Pradivstev, A. ; Santos II, M. ; Koo, A.
Pub. info.: Interferometry XIII: Techniques and Analysis.  pp.629211-629211,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6292
4.

Conference Proceedings
Conference Proceedings
4. Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive characterization of MEMS・ structures [6111-26]
Walecki, W. J. ; Azfar, T. ; Pravdivstev, A. ; SantosII, M. ; Wong, T. ; Feng, A. ; Koo, A.
Pub. info.: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V.  pp.61110M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6111