1.

Conference Proceedings
Conference Proceedings
1. Kinetics of the C49 to C54 Phase Transformation in TiSi2 Thin Films on Deep-Sub-Micron Lines
Kittl, J. A. ; Prinslow, D. A. ; Apte, P. P. ; Pas, M. F.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.269-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
2.

Conference Proceedings
Conference Proceedings
2. Effect of Mo Doping on Formation of Ti-Silicide Phases Studied by HRTEM
Gribelyuk, M. A. ; Samavedam, S. B. ; Kittl, J. A.
Pub. info.: Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A..  pp.91-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 523
3.

Conference Proceedings
Conference Proceedings
3. Optimization of Ti and Co Self-Aligned Silicide RTP for 0.10ｦﾌm CMOS
Kittl, J. A. ; Hong, Q. Z. ; Yang, H. ; Yu, N. ; Rodder, M. ; Apte, P. P. ; Shiau, W. T. ; Chao, C. P. ; Breedijk, T. ; Pas, M. F.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.331-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
4.

Conference Proceedings
Conference Proceedings
4. Low-Temperature Formation of C54 TiSi2 By-Passing the C49 Phase: Effect of Si Crystallinity, Metallic Impurities and Applications to 0.10 ｦﾌm CMOS
Kittl, J. A. ; Gribelyuk, M. A. ; Samavedam, S. B. ; Hong, Q. Z. ; Yu, N. ; Rodder, M.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.201-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
5.

Conference Proceedings
Conference Proceedings
5. Optimization of Ti and Co Self-Aligned Silicide RTP for 0.10 ｦﾌm CMOS
Kittl, J. A. ; Hong, Q. Z. ; Yang, H. ; Yu, N. ; Rodder, M. ; Apte, P. P. ; Shiau, W. T. ; Chao, C. P. ; Breedijk, T. ; Pas, M. F.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.255-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
6.

Conference Proceedings
Conference Proceedings
6. Test of Kinetic Models for Interface Velocity, Temperature, and Solute Trapping in Rapid Solidification
Kittl, J. A. ; Aziz, M. J. ; Brunco, D. P. ; Thompson, M. O.
Pub. info.: Thermodynamics and kinetics of phase transformations : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.119-,  1996.  Pittsburgh, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 398
7.

Conference Proceedings
Conference Proceedings
7. Mechanisms of Thin Film Ti and Co Silicide Phase Formation on Deep-Sub-Micron Geometries and Their Implications and Applications to 0.18 ｦﾌm CMOS and Beyond
Kittl, J. A. ; Hong, Q. Z. ; Rodder, M.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.505-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
8.

Conference Proceedings
Conference Proceedings
8. Modeling of Device Characteristics as Function of Ti Salicide Rapid Thermal Processing Parameters for Deep-Sub-Micron CMOS Technologies
Kittl, J. A. ; Prinslow, D. A. ; Misium, G. ; Pas, M. F.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.175-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429