Materials structure & micromechanics of fracture IV : MSMF-4 : proceedings of the fourth International Conference on Materials Structure & Micromechanics of Fracture, Brno, Czech Republic, June 23-25, 2004. pp.25-32, 2005. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Kitamura, T. ; Kubota, K. ; Hasebe, T. ; Sakai, F. ; Nakazawa, S. ; Vohra, N. ; Yamamoto, M. ; Inoue, M.
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Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.73-84, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Materials structure & micromechanics of fracture IV : MSMF-4 : proceedings of the fourth International Conference on Materials Structure & Micromechanics of Fracture, Brno, Czech Republic, June 23-25, 2004. pp.127-130, 2005. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Kitamura, T. ; Kubota, K. ; Hasebe, T. ; Sakai, F. ; Nakazawa, S. ; Vohra, N. ; Yamamoto, M. ; Inoue, M.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XII. pp.988-999, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering