1.

Conference Proceedings
Conference Proceedings
1. Lattice Strain and Defects in Epitaxial Silicon Wafers*
Kirscht,F. ; Snegirev,B. ; Zaumseil,P. ; Kissinger,G. ; Takashima,K. ; Wildes,P. ; Hennessy,J.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.60-67,  1997.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3322
2.

Conference Proceedings
Conference Proceedings
2. Frequency-Resolved Surface Photo Voltage for Epi Wafer Characterization
Buczkowski,A. ; Romanowski,A. ; Kirscht,F.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.400-407,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895