1.

Conference Proceedings

Conference Proceedings
Boyd, S. ; Kim, S.-J. ; Patil, D. ; Horowitz, M.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.615608-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings

Conference Proceedings
Kim, S.-J. ; Park, J.-B. ; Kim, S.H. ; Kang, H.-Y. ; Kang, Y.-M. ; Park, S.-W. ; An, I. ; Oh, H.-K.
Pub. info.: Photomask Technology 2006.  pp.63492T-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
3.

Conference Proceedings

Conference Proceedings
Park, J.-M. ; Kim, S.-J. ; Jung, J.-G. ; Hansen, G. ; Yoon, D.-J.
Pub. info.: Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems.  pp.61742U-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6174