Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.615608-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Park, J.-M. ; Kim, S.-J. ; Jung, J.-G. ; Hansen, G. ; Yoon, D.-J.
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Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems. pp.61742U-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering