1.

Conference Proceedings
Conference Proceedings
1. FORMATION OF DIVICE QUALITY Si/SiO2 INTERFACES IN A MULTICHAMBER INTEGRATED PROCESSING SYSTEM
Kim, S. S. ; Tsu, D. V. ; Lucovsky, G. ; Fountain., G. G. ; Markunas, R. J
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.327-332,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
2.

Conference Proceedings
Conference Proceedings
2. SUBSTRATE INTERACTIONS IN THE FORMATION OF AMORPHOUS SILICON/DIELECTRIC INTERFACES
Parsons, G. N. ; Kim, S. S. ; Lucovsky, G.
Pub. info.: Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A..  pp.265-270,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 149