1.

Conference Proceedings
Conference Proceedings
1. Effect of First Wafer on the CD Bias in DARC/Poly Gate Structure
Chen, L. ; Singh, M. ; Kim, N-H. ; Chu, C. ; Chinn, J.
Pub. info.: Plasma processing XIII : proceedings of the international symposium.  pp.183-197,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-6
2.

Conference Proceedings
Conference Proceedings
2. Development of a High Flow PET Process in HDP Dielectric Etch Systems
Kim, N-H.
Pub. info.: Plasma processing XIII : proceedings of the international symposium.  pp.335-348,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-6
3.

Conference Proceedings
Conference Proceedings
3. Optimization by Concentration of Oxidizer and Complexing Agent in Cu CMP Slurry
Kim, I.-P. ; Kim, N-H. ; Lim, J.-H. ; Kim, S.-Y. ; Chan, E.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.120-125,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21