1.

Conference Proceedings
Conference Proceedings
1. Thermal Stability of Sputtered Ta/PECVD SiOF Films for Intermetal Dielectric Applications
Kim, K. ; Park, S. ; Lee, G.S.
Pub. info.: Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability.  pp.165-169,  1998.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-6
2.

Conference Proceedings
Conference Proceedings
2. Inorganic-Organic Hybrid Materials For Photonics
Lal, M. ; Joshi, M. ; Kumar, D. N. ; Friend, C. S. ; Winiarz, J. ; Asefa, T. ; Kim, K. ; Prasad, Paras N.
Pub. info.: Organic/inorganic hybrid materials : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.217-,  1998.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 519