Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.. pp.117-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Keiner, H. ; Preissig, F. J. von ; Zeng, H. ; Nejhad, M. N. G. ; Kim, E. S.
Pub. info.:
Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.. pp.229-, 1998. Warrendale, Pa.. MRS - Materials Research Society