1.

Conference Proceedings
Conference Proceedings
1. Analysis of SiGe FET Device Structures on Silicon-on-Sapphire Substrates by X-ray Diffraction
Mooney, P. M. ; Chu, J. O. ; Ott, J. A. ; Jordan-Sweet, J. L. ; Dubbelday, W. B. ; Kavanagh, K. L. ; Lagnado, I. ; Meyerson, B. S.
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.55-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
2.

Conference Proceedings
Conference Proceedings
2. Effect of Oxygen on the Degradation of Ti-Si-N Diffusion Barriers in Cu Metallization
McArthur, W. F. ; Ring, K. M. ; Morgan, B. ; Hurst, Q. ; Serber, D. ; Clark, A. ; Kavanagh, K. L.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.321-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514