Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.229-236, 2001. Pennington, N.J.. Electrochemical Society
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.37-40, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.107-110, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.57-60, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Karpov, S.Yu. ; Kulik, A.V. ; Ramm, M.S. ; Mokhov, E.N. ; Roenkov, A.D. ; Vodakov, Yu.A. ; Makarov, Yu.N.
Pub. info.:
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.779-782, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications