1.

Conference Proceedings
Conference Proceedings
1. Providing technology infrastructure for MEMS
Ribas,R.P. ; Veychard,D. ; Karam,J.M. ; Courtois,B.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.298-305,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings
Conference Proceedings
2. Advanced integrated solution for MEMS design
Liateni,K. ; Moulinier,D. ; Affour,B. ; Boutamine,H. ; Karam,J.M. ; Veychard,D. ; Courtois,B. ; Cao,A.D.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.161-170,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
3.

Conference Proceedings
Conference Proceedings
3. Integrated mixedtechnology design environment to support micro-electro-mechanical systems development
Karam,J.M. ; Courtois,B. ; Cao,A.D. ; Hofmann,K.
Pub. info.: Micromachined Devices and Components IV.  pp.278-286,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
4.

Conference Proceedings
Conference Proceedings
4. Engineering tool set for monolithic and hybrid microsystem design
Boutamine,H. ; Karam,J.M. ; Courtois,B. ; Drake,P. ; Oudinot,J. ; El Tahawi,H. ; Cao,A. ; Rencz,M. ; Poppe,A. ; Szekely,V.
Pub. info.: Microlithography and Metrology in Micromachining III.  pp.76-84,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3225
5.

Conference Proceedings
Conference Proceedings
5. MEMS CAD and foundries: where are we going? (Invited Paper)
Karam,J.M.
Pub. info.: Micromachined Devices and Components III.  pp.232-237,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224