1.
Conference Proceedings
Matsuo,T. ; Onodera,T. ; Itani,T. ; Morimoto,H. ; Haraguchi,T. ; Kanayama,K. ; Otaki,M.
Pub. info.:
20th Annual BACUS Symposium on Photomask Technology . pp.268-274, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
2.
Conference Proceedings
Ii,T. ; Saga,T. ; Hattori,Y. ; Ohshima,T. ; Otaki,M. ; Iwakata,M. ; Haraguchi,T. ; Kanayama,K. ; Yamazaki,T. ; Fukuhara,N. ; Matsuo,T.
Pub. info.:
20th Annual BACUS Symposium on Photomask Technology . pp.297-308, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
3.
Conference Proceedings
Kanayama,K. ; Haraguchi,T. ; Yamazaki,T. ; Ii,T. ; Matsuo,T. ; Fukuhara,N. ; Saga,T. ; Hattori,Y. ; Ooshima,T. ; Otaki,M.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology VIII . pp.147-154, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4409